Active Isolation System

The AIS consists of a PLC, CAN-bus, 16bit-controllers, High Speed electro pneumatic servo-valves and BiAir air springs and/or HAB horizontal air springs. Ranges of sizes are available for both the vertical and horizontal air springs. 

One 16bit controller and one High Speed valve is used for each air spring or group of air springs. The AIS works with a minimum of 3 groups (degrees of freedom) to a maximum of 6 groups (degrees of freedom).

Range of Application – optimal vibration isolation performance for machines with high dynamic forces that are performing sensitive measurements and inspections, lithography equipment, laser machines, high-res electron microscopes and machinery for the semi-conductor industry.

AIS has two primary functions:

  1. To protect the precision machine from floor vibration
  2. Improve performance of the machine by minimizing structure borne vibration created by the high dynamic forces produced during an acceleration (or deceleration) of a moving mass within the machine.

Key Features:

  • Active electro pneumatic vibration isolation with up to 6 degrees of freedom
  • Highly effective vibration isolation without resonance amplification
  • Optimal horizontal and vertical positional precision – minimal deflection and settling time when machine changes loads.
  • Real time control
  • Each controller consists of a microprocessor, and integrated high-res sensors for position, air pressure and acceleration.
  • Easy to use intelligent WinSNI software for setting up and optimizing AIS, and for providing system diagnostics.
  • No feed-forward signal required.
  • No generation of heat or magnetic fields which could disturb machine operation, unlike electro-magnetic actuators or linear motors.

For further technical information and application examples please download the brochure here.

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